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Expert Witness Code 4415
Professional Summary:

This Ph.D. has over 30 years of research, academic, industry, and consulting engineering experience in the fields of microelectronics and integrated circuit fabrication.  His research involves semiconductor patterning and microlithography (optical, DUV, electron beam, and EUV), materials and processes (dielectrics, metals, silicon, IR, and wide-band gap materials), thin films and deposition (sputtering, PVD, and CVD), LCD processing, UV lasers, photomasks, photoresist materials, etching (plasma, RIE, and wet etch),  wafer and substrate processing, HDD processing, and modelling & simulation.  He is a chaired professor of Microelectronic Engineering with 20 years of research and teaching experience.  His industry experience includes manufacturing as well as R&D and he has worked with companies in the US, Europe, and Asia.  He is a skilled technical consultant and expert witness with experience in intellectual property, patent litigation, patent re-examination, trial testimony (bench and jury), report writing, deposition, and International Trade Commission (ITC) cases.  He has been elected a Fellow of SPIE and is highly regarded in the engineering field and in academia.  This Ph.D. has over 100 publications including technical papers, articles, textbooks, and textbook chapters.  He holds over 20 patents and has licensed his technology both nationally and internationally.  He has taught microelectronic engineering graduate and undergraduate courses for 20 years and has developed and delivered over 50 industrial courses covering aspects of silicon processing and microlithography. 

He has expertise and is able to serve as an expert witness in semiconductor IC fabrication, microlithography, LCD and flat panel processing, materials and processes (dielectrics, metals, silicon, and wide band gap semiconductors), photomask design and fabrication, thin films and deposition (PVD and CVD), optical systems, HDD processes, photoresist materials and processing, plasma and dry etching, UV lasers and laser processing, patterned magnetic media, wafer and substrate cleaning, and metrology.

Expertise:
  • LCD & Flat Panel Processes
  • Microlithography & Patterning
  • Microsystems
  • Optics & Optical Systems
  • Patterned Magnetic Media for Hard Disks
  • Photomask Fabrication & Design
  • Photoresist Materials & Processes
  • Plasma, Dry Etching, RIE, & Wet Etch
  • Polarization Components
  • Semiconductor IC Fabrication
  • Thin films & deposition (PVD/CVD)
  • UV Lasers & Laser Processing
  • Wafer & Substrate Processing
Additional Information:
  • Ph.D., Center for Imaging Science. Thesis: "Excimer Laser Microlithography at 193nm."
  • B.S., M.S., Photographic and Imaging Science. Thesis: "Optically Transparent Heat Mirror Films of ZnS-Ag-ZnS."

Expert Witness Services:

  • Claim Construction
  • Deposition
  • Expert Witness Reports
  • Expert Witness Testimony
  • Intellectual Property
  • International Trade Commission ( ITC )
  • Patent Analysis
  • Patent Litigation
  • Patent Portfolio Review
  • Pre-Litigation
  • Prior Art Research
  • Technical Consultant
  • Trial Testimony

 

To Hire This Expert call 1-866-873-7890 (Ext. 220) or Email Us

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